Coincident rotation center.
Patented Inline actuators provide ease of access and multiple unit workstations.
Patented 25x Ratio Drive™ system affords superior 10 nm XY resolution for far less cost.
Small footprint allows multiple unit workstations.
Onboard controller for actuators avoids high cost of separate motion controllers.
Damped exterior shell design provides superior vibration and touch insensitivity.
Lightweight aluminum construction allows system to be moved easily by other motion equipment.
High mechanical stiffness affords rugged and stable base system.
Patented linear dual flexure Z offers frictionless repeatable straight travel.
Dual flexure Yaw and Pitch stages provide extreme resolution without arc error.