P6: 6-Axis XYZ Roll Yaw Pitch Nanopositioning 25x Flexure Stage

I6000

Feature Summary

  • Coincident rotation center.
  • Patented Inline actuators provide ease of access and multiple unit workstations.
  • Patented 25x Ratio Drive™ system affords superior resolution for far less cost.
  • Small footprint allows multiple unit workstations.
  • Onboard controller for actuators avoids high cost of separate motion controllers.
  • Damped exterior shell design provides superior vibration and touch insensitivity.
  • Lightweight aluminum construction allows system to be moved easily by other motion equipment.
  • High mechanical stiffness affords rugged and stable base system.
  • Patented linear dual flexure Z offers frictionless repeatable straight travel.
  • Dual flexure Yaw and Pitch stages provide extreme resolution without arc error.

With positioning this easy... the possibilities are endless.

Overview

Superior Performance

Imagine a positioning system so stable and easy to adjust that aligning singlemode fiber optical fibers is about as difficult as tuning a radio! No need to let go of the micrometers while adjusting - the I6000 is extremely touch insensitive. And with the patented ergonomic inline design, all the micrometers are easily accessible on one side - just rest your hand comfortably on the table and enjoy the ease and efficiency of quickly aligning any type of fiber. No fiber alignment challenge is too difficult - even 1-2 micron core lensed fibers can easily be aligned. This is possible because of the radical departure from conventional design. 

Innovation

All other stages are direct-drive while the Luminos I6000 uses a patented Ratio Drive™ on the X & Y axes. A standard micrometer, which has about 1/3 the backlash of a differential micrometer, is further improved by the 25x Ratio Drive™ resulting in a backlash of only 20 nanometers and an incredible single-sided resolution of just 1 nanometer! The roll, yaw, and pitch axes use similar leverage techniques to transform linear motion from the actuator into extremely precise rotational movements at the output.

Conventional stacked stages have separate frames with each frame simply mounted on the output of the previous stage. This results in the stiffness at the micrometer being degraded by the lack of stiffness between the mounting reference and output of each stage below it. Hand forces on the micrometer are then easily transmitted directly to the output causing the the alignment to wander and typically results in a adjust, release, and wait cycle by the operator. The I6000 consists of only 2 frames. The Z stage is one frame while all the other micrometers are anchored to a shared fixed frame that is attached directly to the output of the Z stage. The Z stage is exceptionally stiff and therefore is not a factor. By sharing a common rigid frame, forces exerted on the micrometers by the operator during adjustment are transmitted directly to the base instead of to the output. The operator can then quickly align without letting go. It really is as easy as tuning a radio!

The I6000 is also vibration and temperature insensitive. Internal damping eliminates many of the resonance effects typically associated with flexure stages.

Automation

Automated I6000 If you require more travel available at the actuator, consider the I6005.

With this advanced design, upgrading to automation is easy and inexpensive. Our standard, low cost stepper motor option provides the I6000 with a resolution of 4 nanometers and a 1/2 millimeter of travel on the X and Y axes. An addition 2 millimeters of manual travel is still available using the coarse adjustments.

A kit (Part#:ACTKIT) is required for each automated positioner. It includes a software CD, a power adapter, a USB serial port adapter (in case your PC has no serial ports available) and the necessary cables. The CD includes ActiveX/COM software which provides a simple interface from LabVIEW 6i/8+/2010, Visual Basic 6, Visual C++ 6.0, or any .NET language.

Accessories

With accessories ranging from fiber array holders to contact sensors, Luminos can get you out-fitted and up-and-running quickly on your applications.

Base Price (USD): $6940.02
'
P6 - X1 - X2 - X3 - X4 - X5 - X6 - X7 - X8 - X9 - X10 - X11
Option Description Price (USD)
X1: Z-Axis Actuator
M Imperial Micrometer $0.00
MM Metric Micrometer $0.00
L
Large Radius Imperial Micrometer
Large knob for easier fine adjustments (imperial).
$0.00
LM
Large Radius Metric Micrometer
Large knob for easier fine adjustments (metric).
$44.32
D Differential Imperial Micrometer $555.16
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X2: X-Axis Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X3: Y-Axis Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X4: Roll Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X5: Yaw Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X6: Pitch Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X7: XY Linear Motors
N None $0.00
X8: XY Coarse Adjust
1
40 pitch set screw
A flush set screw that gives 1/40 inches per revolution.
$0.00
2
40 pitch thumbscrew
A small knob that gives 1/40 inches per revolution at the output. Allows easy adjustment of the coarse control.
$25.66
2A
40 pitch thumbscrew with ext. for XY steppers
A small knob that gives 1/40 inches per revolution at the output. Allows easy adjustment of the coarse control. The X and Y actuators require an extension to leave enough room to access the knobs.
$139.96
X9: Mounting Axis
H
Horizontal
The positioner is set up to be balanced in the horizontal and upright position. (This is the default configuration)
$0.00
V
Vertical
The postioner is set up to be balanced with the micrometers pointing up. This configuration requires more preload on the Z-axis.
$0.00
X10: Side Damper
N None $0.00
D
Included
Side damper installed. Quiets vibration in the Y axis.
$293.91
X11: Units
SI
Metric
Metric Mounting Plate
$0.00
I
Imperial
Imperial Mounting Plate
$0.00

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Specifications

Travel
Axis Actuator1 Coarse Total
Z - focus 12.7mm (0.5") N/A 12.7mm (0.500")
Y - vertical 0.5mm (0.02") 2mm (0.080") 2.5mm (0.1")
X - lateral 0.5mm (0.02") 2mm (0.080") 2.5mm (0.1")
Roll ±1.5 degrees N/A ±1.5 degrees
Yaw ±1.5 degrees N/A ±1.5 degrees
Pitch ±1.5 degrees N/A ±1.5 degrees
Setability (Micrometer)
Axis Resolution2 Movement/Division
Z 0.25 micron (10µ-inch) 0.001"
Y 10nm (0.4µ-inch) 1µm
X 10nm (0.4µ-inch) 1µm
Roll 0.1 arc sec 10 arc sec 
Yaw 0.2 arc sec 30 arc sec
Pitch 0.2 arc sec 30 arc sec
Resolution (Stepper Motor)
Axis Resolution Total Steps
Z 100nm (4µ-inch) 128 000
Y 4nm (0.16µ-inch) 128 000
X 4nm (0.16µ-inch) 128 000
Roll 0.1 arc sec 101 206
Yaw 0.2 arc sec 60 416
Pitch 0.2 arc sec 60 416
Stage Configuration & Arc Error Motion
Axis  Flexure Type Drive Type Arc Error
Z Dual Direct Drive None - True Linear Motion
Y  Single 25x Ratio Drive™ Max 30µm - Arc Error in Z only
X  Single 25x Ratio Drive™ Max 30µm - Arc Error in Z only
Roll  Single Rotational Max 35µm
Yaw  Dual Rotational None
Pitch  Dual Rotational None
Linear Stiffness
Along Axis Stiffness Comments
Z 130 kN/m measured at the rotation center
Y 95 kN/m
X 40 kN/m
Torsional Stiffness
About Axis Stiffness Comments
Z - roll 75Nm/rad measured at the rotation center
Y - yaw 100Nm/rad
X - pitch 130Nm/rad
Maximum Load
Static Load Transient Load Comments
2.2 lbs (1kg) 10 lbs (4.5kg) stage must be protected from shock loading during transport and usage
Physical Properties
Characteristic Specifications Comments
Construction Aluminum 6061 & 7075 - T6 anodized
Weight 1.5kg Approximate
Body Dimensions 5.79"  x 1.75" x 5.19" LxWxH excluding micrometers
Mounting Height 5.19"  Base to top of mounting plate
Mounting Config. 0.26" dia. holes 1.00" x 4.00" centers3
Coincident Rotation Center 1/2" Above top of mounting plate
1" Out from end of mounting plate
  1. 'Actuator' refers to a micrometer or stepper motor.
  2. Operator dependent
  3. Compatible with 1.00" grid optical tables, units mount on 2" intervals with 0.25" allowance for routing of cables etc.

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