P5A: 5-Axis XYZ Yaw Pitch Nanopositioning 5x Flexure Stage

I5005 Automated

Feature Summary

  • Coincident rotation center.
  • Patented Inline actuators provide ease of access.
  • Patented 5x Ratio Drive™ system affords superior resolution for far less cost.
  • Small footprint allows multiple unit workstations.
  • Onboard controller for actuators avoids high cost of separate motion controllers.
  • Damped exterior shell design provides superior vibration and touch insensitivity.
  • Lightweight aluminum construction allows system to be moved easily by other motion equipment.
  • High mechanical stiffness affords rugged and stable base system.
  • Patented linear dual flexure Z offers frictionless repeatable straight travel.
  • Dual flexure Yaw and Pitch stages provide extreme resolution without arc error

Overview

Precision Automation

If automation is more your focus, consider the I5005 5-Axis Positioner.  This stage provides automated control of a full 2.5 millimeters of travel on the X & Y axes and with a resolution of 20 nanometers!  On the focal axis, Z, a full 12.7 millimeters (1/2 inch) of travel makes it easy to access parts or defocus sufficiently to find first-light.  The resolution on the Z axis, generally less critical in most applications, is still a respectable 100 nanometers.  Both rotational axes, pitch and yaw, allow a full ±1.5 degrees of travel with an astounding resolution of 0.2 arc seconds!  The I5005 makes high precision alignments easy due to it's  revolutionary design.

Innovation

I5005

All other stages are direct-drive which means the stage is effectively limited by the resolution of the actuator.  This places an immense burden on the actuator to be incredibly precise.  The Luminos I5005 takes a unique approach that removes that burden from the actuator and allows the stage to use a much simpler, lower resolution, and therefore more cost-effective actuator.  The patented 5x Ratio Drive™ system effectively improves the actuator's resolution and decreases the backlash by a factor of 5!  This allows an otherwise marginal actuator to accomplish difficult alignments effortlessly.  Similar leverage techniques are used on the rotational axes to transform linear motion at the actuator to extraordinarily precise rotational movements at the output.

With an all-flexure design, the stage itself is not limited by friction, and exhibits relatively no backlash and near infinite resolution.  Since there is no friction, dust and wear is not a factor as it is with roll-bearing stages.

Way ahead of it's time, the patented inline actuators and compact design allow the I5005 to placed side-by-side to allow many alignments at a single workstation.  Alternatively, it allows many I5005 positioners to get in a tight spot to access multiple inputs and outputs of a single device during testing or assembly.

A Flexible Upgrade Path

While the I5000 provides both a fine and coarse adjustment, the I5005 makes the full 2.5 millimeters of travel available at the actuator and eliminates the coarse adjustment.  Although the I5005 is available as a manual unit, consider the I5000 if you expect to stick with a manual system.  However, if you expect to move to automation eventually but a manual stage is preferred to start, a manual I5005 can easily be upgraded with stepper motor actuators later at a much lower cost than competitive stages.  

A kit (Part#:ACTKIT) is required for each automated positioner. It includes a software CD, a power adapter, a USB serial port adapter (in case your PC has no serial ports available) and the necessary cables. The CD includes ActiveX/COM software which provides a simple interface from LabVIEW 6i/8+/2010, Visual Basic 6, Visual C++ 6.0, or any .NET language.

Accessories

With accessories ranging from fiber array holders to contact sensors, Luminos can get you out-fitted and up-and-running quickly on your applications.

Base Price (USD): $5948.13
'
P5A - X1 - X2 - X3 - X4 - X5 - X6 - X7 - X8
Option Description Price (USD)
X1: Z-Axis Actuator
M Imperial Micrometer $0.00
MM Metric Micrometer $0.00
L
Large Radius Imperial Micrometer
Large knob for easier fine adjustments (imperial).
$0.00
LM
Large Radius Metric Micrometer
Large knob for easier fine adjustments (metric).
$44.32
D Differential Imperial Micrometer $555.16
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X2: X-Axis Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X3: Y-Axis Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X4: Yaw Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X5: Pitch Actuator
M Manual Micrometer $0.00
B Stepper, Long Life, 0.2µm microstep, RS-232 Onboard Controller $1,140.64
A Stepper, Fine Travel, 0.1µm microstep, RS-232 Onboard Controller $1,343.58
X6: Mounting Axis
H
Horizontal
The positioner is set up to be balanced in the horizontal and upright position. (This is the default configuration)
$0.00
V
Vertical
The postioner is set up to be balanced with the micrometers pointing up. This configuration requires more preload on the Z-axis.
$0.00
X7: Side Damper
N None $0.00
D
Included
Side damper installed. Quiets vibration in the Y axis.
$293.91
X8: Units
SI
Metric
Metric Mounting Plate
$0.00
I
Imperial
Imperial Mounting Plate
$0.00

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Specifications

Travel
Axis Actuator1 Coarse Total
Z - focus 12.7mm (0.5") N/A 12.7mm (0.5")
Y - vertical 2.5mm (0.1") 2.5mm (0.1")
X - lateral 2.5mm (0.1") 2.5mm (0.1")
Roll ±1.5 degrees ±1.5 degrees
Yaw ±1.5 degrees ±1.5 degrees
Pitch ±1.5 degrees ±1.5 degrees
Setability (Micrometer)
Axis Resolution2 Movement/Division
Z 0.25 micron (10µ-inch) 0.001"
Y 50nm (2µ-inch) 5µm
X 50nm (2µ-inch) 5µm
Roll 0.1 arc sec 10 arc sec 
Yaw 0.2 arc sec 30 arc sec
Pitch 0.2 arc sec 30 arc sec
Resolution (Stepper Motor)
Axis Resolution Total Steps
Z 100nm (4µ-inch) 128 000
Y 20nm (0.8µ-inch) 128 000
X 20nm (0.8µ-inch) 128 000
Roll 0.1 arc sec 101 206
Yaw 0.2 arc sec 60 416
Pitch 0.2 arc sec 60 416
Stage Configuration & Arc Error Motion
Axis  Flexure Type Drive Type Arc Error
Z  Dual Direct Drive None - True Linear Motion
Y  Single 5x Ratio Drive™ Max 30µm - Arc Error in Z only
X  Single 5x Ratio Drive™ Max 30µm - Arc Error in Z only
Roll  Single Rotational Max 35µm
Yaw  Dual Rotational None
Pitch  Dual Rotational None
Linear Stiffness
Along Axis Stiffness Comments
Z 140 kN/m measured at the rotation center
Y 110 kN/m
X 40 kN/m
Torsional Stiffness
About Axis Stiffness Comments
Z - roll 150Nm/rad measured at the rotation center
Y - yaw 100Nm/rad
X - pitch 130Nm/rad
Maximum Load
Static Load Transient Load Comments
2.2 lbs (1kg) 10 lbs (4.5kg) stage must be protected from shock loading during transport and usage
Physical Properties
Characteristic Specifications Comments
Construction Aluminum 6061 & 7075 - T6 anodized
Weight 1.5kg Approximate
Body Dimensions 5.79"  x 1.75" x 5.19" LxWxH excluding micrometers
Mounting Height 5.19"  Base to top of mounting plate
Mounting Config. 0.26" dia. holes 1.00" x 4.00" centers3
Coincident Rotation Center 1/2" Above top of mounting plate
1" Out from end of mounting plate
  1. 'Actuator' refers to a micrometer or stepper motor.
  2. Operator dependent
  3. Compatible with 1.00" grid optical tables, units mount on 2" intervals with 0.25" allowance for routing of cables etc.

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