Z	X		Y		Roll	Yaw	Pitch
	Direct Drive IX00X	25x Ratio IX000	5x Ratio IX005	25x Ratio IX000	5x Ratio IX005	All Flexure Drive I600X, I500X, RYP3000, YP2000
Travel
Actuator1	12.7 mm	0.5 mm	2.5 mm	0.5 mm	2.5 mm	3 deg	3 deg	3 deg
Coarse		2.0 mm		2.0 mm
Total	12.7 mm	2.5 mm	2.5 mm	2.5 mm	2.5 mm	3 deg	3 deg	3 deg
Resolution
Micrometer2	250 nm	10 nm	50 nm	10 nm	50 nm	0.25 arc-sec	0.5 arc-sec	0.5 arc-sec
Stepper Motor	100 nm	4 nm	20 nm	4 nm	20 nm	0.1 arc-sec	0.2 arc-sec	0.2 arc-sec
Stage Configuration & Arc Error Motion
Flexure Design	Dual	Single		Single		Single	Dual	Dual
Arc Error	None	Max 30 µm in Z Only		Max 30 µm in Z Only		Max 35µm	None	None
Products	I1000 I3000 I3005 I5000 I5005 I6000 I6005 ZRYP4000	I3000 I5000 I6000	I3005 I5005 I6005	I3000 I5000 I6000	I3005 I5005 I6005	I6000 I6005 RYP3000 ZRYP4000	I5000 I5005 I6000 I6005 RYP3000 YP2000 ZRYP4000	I5000 I5005 I6000 I6005 RYP3000 YP2000 ZRYP4000

¹ Actuator here refers to both a micrometer and a stepper motor actuator
² Resolution of the micrometer refers to the minimum adjustment by an operator