Flexure Nano/Micro Positioner Stages

Linear (XYZ)

Rotational (Roll, Yaw, Pitch)

Linear Rotational Hybrid

I6000 Automated I6000 Manual

P6: 6-Axis Roll, Yaw, Pitch, XYZ Nanopositioning Flexure Stage

  • Roll: ±1.5 degrees of Travel, 0.1 arc sec Resolution
  • Yaw, Pitch: ±1.5 degrees of Travel, 0.2 arc sec Resolution
  • X,Y: 0.5mm Travel + 2mm Coarse Adjust, 4nm step, 25x Ratio Drive
  • Z: 0.5" / 12.7mm Travel (linear dual flexure), 100nm step
  • Coincident/shared rotation center
  • All Damped Flexure Design
  • Manual and Automated Available
More »
I6005 Automated I6005 Manual

P6A: 6-Axis Roll, Yaw, Pitch, XYZ Nanopositioning Flexure Stage

  • Roll: ±1.5 degrees of Travel, 0.1 arc sec Resolution
  • Yaw, Pitch: ±1.5 degrees of Travel, 0.2 arc sec Resolution
  • X,Y: 2.5mm Travel, 20nm step, 5x Ratio Drive
  • Z: 0.5" / 12.7mm Travel (linear dual flexure), 100nm step
  • Coincident/shared rotation center
  • All Damped Flexure Design
  • Manual and Automated Available
More »
I5000 Manual

P5: 5-Axis Yaw, Pitch, XYZ Nanopositioning Flexure Stage

  • Yaw, Pitch: ±1.5 degrees of Travel, 0.2 arc sec Resolution
  • X,Y: 0.5mm Travel + 2mm Coarse Adjust, 4nm step, 25x Ratio Drive
  • Z: 0.5" / 12.7mm Travel (linear dual flexure), 100nm step
  • Coincident/shared rotation center
  • All Damped Flexure Design
  • Manual and Automated Available
More »
I5005 Manual

P5A: 5-Axis Yaw, Pitch, XYZ Nanopositioning Flexure Stage

  • Yaw, Pitch: ±1.5 degrees of Travel, 0.2 arc sec Resolution
  • X,Y: 2.5mm Travel, 20nm step, 5x Ratio Drive
  • Z: 0.5" / 12.7mm Travel (linear dual flexure), 100nm step
  • Coincident/shared rotation center
  • All Damped Flexure Design
  • Manual and Automated Available
More »
I5005 Manual

P4ZRYP: 4-Axis Roll, Yaw, Pitch, Z Micropositioning Flexure Stage

  • Roll: ±1.5 degrees of Travel, 0.1 arc sec Resolution
  • Yaw, Pitch: ±1.5 degrees of Travel, 0.2 arc sec Resolution
  • Z: 0.5" / 12.7mm Travel (linear dual flexure), 100nm step
  • Coincident/shared rotation center
  • All Damped Flexure Design
  • Manual and Automated Available
More »

Positioning Accessories

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Positioner Selection Guide

A summary of the different types of axes and the positioners that include them.

Z X Y Roll Yaw Pitch
Direct
Drive
IX00X
25x
Ratio

IX000
5x
Ratio

IX005
25x
Ratio

IX000
5x
Ratio

IX005
All Flexure Drive
I600X, I500X, RYP3000, YP2000
Travel
Actuator1 12.7 mm 0.5 mm 2.5 mm 0.5 mm 2.5 mm 3 deg 3 deg 3 deg
Coarse   2.0 mm   2.0 mm        
Total  12.7 mm 2.5 mm 2.5 mm 2.5 mm 2.5 mm 3 deg 3 deg 3 deg
Resolution
Micrometer2 250 nm 10 nm 50 nm 10 nm 50 nm 0.25 arc-sec 0.5 arc-sec 0.5 arc-sec
Stepper
Motor
100 nm 4 nm 20 nm 4 nm 20 nm 0.1 arc-sec 0.2 arc-sec 0.2 arc-sec
Stage Configuration & Arc Error Motion
Flexure Design Dual Single Single Single Dual Dual
Arc Error None Max 30 µm in Z Only Max 30 µm in Z Only Max 35µm None None
Products I1000
I3000
I3005
I5000
I5005
I6000
I6005
ZRYP4000
I3000
I5000
I6000
I3005
I5005
I6005
I3000
I5000
I6000
I3005
I5005
I6005
I6000
I6005
RYP3000
ZRYP4000
I5000
I5005
I6000
I6005
RYP3000
YP2000
ZRYP4000
I5000
I5005
I6000
I6005
RYP3000
YP2000
ZRYP4000
  1. 'Actuator' here refers to both a micrometer and a stepper motor actuator
  2. Resolution of the micrometer refers to the minimum adjustment by an operator

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